QA5
This is a list of the geometrical constants for the different QA structures to be used in the algorithms for parameter extraction calculations:
- Mini:
- Active Area = 63.435 mm2 (Calculated from the area within the bias ring: (7888.5 + 25) x (7991 + 25) µm2) (TBD)
- Active Thickness = 295 µm (TBD)
- Active Volume = (TBD)
- MD8:
- Active Area = 0.5095 cm2 (Calculated from the pad area: (7183 um – 45 um)2)
- Coupling Capacitor:
- Strip Length = 3.4 cm
- Strip Area = 54.4 cm2
- Field Oxide Capacitor:
- Capacitor Area = 55.6 cm2
- Nominal substrate doping = 4·1012 cm-3
- Cross-Bridge Resistors:
- Bar Length = 400 µm
- Interdigitated Structures:
- Strip length
- PTP structure:
- Nominal Rbias = 1.5 × 106 Ω
| Test chip type | Position | Label | Strip length (cm) |
|---|---|---|---|
| ALL | LOW | SS | 2.401 |
| SS & LS | MID/UP | SS/LS | 2.401 / 4.836 |
| R0 | MID/UP | R0S0/R0S3 | 1.895 / 3.192 |
| R1 | MID/UP | R1S0/R1S3 | 1.805 / 1.508 |
| R2 | MID/UP | R2S0/R2S1 | 3.08 / 3.08 |
| R3 | MID/UP | R3S0/R3S3 | 2.618 / 2.618 |
| R4 | MID/UP | R4S0/R4S1 | 5.03 / 5.39 |
| R5 | MID/UP | R5S0/R5S1 | 4.016 / 5.929 |